Diffraction Grating Scatterometry

This feature uses the Analytic Wave-guide Method to calculate diffraction efficiencies and phases for gratings. It plots scattered rays and tests reciprocity for accuracy.

The Analytic Wave-guide Method uses eigenfunctions rather that Fourier approximation. This method has been proven to be faster, more accurate and move convergent than the rigorous coupled wave method and is similar to the Botten Method.

Metrologia calculates energy efficiencies and phases for all non-evenescent diffraction orders for reflecting and transmitting diffraction gratings. Only Bragg angles of incidence are allowed, and the same restrictions on the grating apply as on the geometries for all the optical models, namely they must be periodic symmetrical line space pairs.

System Requirements

Metrologia will run under Windows 95 or Windows NT on a standard PC type of computer. It requires a minimum of 16 megabytes of memory for full functionality, but 32 megabytes is recommended. Approximately 50 megabytes of free disk space are also recommended. It is a windows program with lots of graphical output and windows type controls.

Pricing

Call for pricing information.